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iCon Dynamics, LLC manufactures patented vapor delivery equipment for solar panel, optical fiber, semiconductor, other industries that use CVD processes. We have developed a full line of fully automated precursor chemical and vapor delivery equipment solutions to support OEMs end users.
iCon Dynamics, LLC was established in May 1996. Today we hold seven US patents and five international patents for our SMR (self-metering reservoir) vapor generator, used in a wide range of liquid precursor CVD applications. For over 10 years we have developed a complete line of products and services serving a top tier global customer base.
·ChemSource– iCon offers mini-bulk and bulk liquid precursor delivery solutions CVD processes. From tool-specific products to plant-wide distribution, our ChemSource products feature continuous operation, safety, purity, and reliability.
· VaporGen – Vapor delivery system, featuring our patented SMR vapor generator and pressure-based mass flow control, provides steady state, continuous operation, with very high capacity and very small footprint.
·InScale - InScale is our new vapor generator that measures its mass transfer rate, unique in the world! The InScale Bubbler eliminates the need for mass flow measurement or vapor concentration instruments to verify the output of a vapor generator.